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Computational lithography: Revision history

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For any version listed below, click on its date to view it. For more help, see Help:Page history and Help:Edit summary. (cur) = difference from current version, (prev) = difference from preceding version, m = minor edit, → = section edit, ← = automatic edit summary

curprev 20:4020:40, 3 May 2025 GreenC bot talk contribs 13,476 bytes +3 Reformat 1 archive link. Wayback Medic 2.5 per WP:USURPURL and JUDI batch #27ab undo

curprev 13:3213:32, 14 December 2024 Rageking890 talk contribs m 13,473 bytes +6 Fix issue where "Computational effort" was not a heading undo

curprev 21:3021:30, 14 June 2023 146.86.35.191 talk 13,467 bytes +93 No edit summary undo

curprev 15:0815:08, 1 June 2023 Moriwen talk contribs m 13,374 bytes −2 Fix misspelling found by Wikipedia:Typo Team/moss – you can help! undo

curprev 16:5816:58, 19 April 2023 Alexander Davronov talk contribs 13,376 bytes +57 History first; wording; add link undo Tag: Visual edit

curprev 16:5916:59, 9 April 2023 75.80.61.48 talk 13,319 bytes +71 →History undo

curprev 10:4410:44, 5 April 2023 Wikkiwonkk talk contribs 13,248 bytes −5 →Computational effort: fixed broken ref link undo

curprev 21:1321:13, 5 October 2022 Lokys dar Vienas talk contribs 13,253 bytes +4 →Optical proximity correction undo
curprev 21:1221:12, 5 October 2022 Lokys dar Vienas talk contribs 13,249 bytes +4 No edit summary undo
curprev 21:0621:06, 5 October 2022 Lokys dar Vienas talk contribs 13,245 bytes −97 No edit summary undo
curprev 21:0121:01, 5 October 2022 Lokys dar Vienas talk contribs 13,342 bytes +8 No edit summary undo

curprev 00:0100:01, 10 August 2022 73.38.222.15 talk 13,334 bytes −8 formatting undo

curprev 11:4411:44, 5 February 2022 Qwerfjkl (bot) talk contribs m 13,342 bytes 0 Capitalising short description "algorithmic approaches to improving resolution in photolithography" per WP:SDFORMAT (via Bandersnatch) undo

curprev 17:5817:58, 24 January 2021 OAbot talk contribs m 13,342 bytes +18 Open access bot: doi added to citation with #oabot. undo

curprev 07:2007:20, 28 November 2020 Monkbot talk contribs m 13,324 bytes −353 Task 18 (cosmetic): eval 12 templates: del empty params (7×); del |postscript= (11×); undo Tag: AWB

curprev 20:3720:37, 3 November 2020 Ethanmorse97 talk contribs 13,677 bytes −33 Removed dead link tag undo Tag: Visual edit: Switched
curprev 20:3520:35, 3 November 2020 Ethanmorse97 talk contribs 13,710 bytes −5 Fixed dead link (see reference 11). undo Tag: Visual edit

curprev 22:3822:38, 16 April 2020 OAbot talk contribs m 13,715 bytes +20 Open access bot: hdl added to citation with #oabot. undo

curprev 22:2822:28, 3 April 2020 Citation bot talk contribs 13,695 bytes +89 Add: pmid, hdl, bibcode. Removed parameters. | You can use this bot yourself. Report bugs here. | Activated by Zppix | Category:Computational fields of study‎ | via #UCB_Category undo

curprev 05:0505:05, 11 January 2020 GreenC bot talk contribs 13,606 bytes +86 Rescued 1 archive link. Wayback Medic 2.5 undo

curprev 02:1802:18, 11 December 2019 Paul2520 talk contribs m 13,520 bytes −58 reference improvements undo

curprev 23:1923:19, 13 November 2019 InternetArchiveBot talk contribs 13,578 bytes +77 Rescuing 0 sources and tagging 1 as dead.) #IABot (v2.0 undo

curprev 10:5810:58, 28 September 2019 Monkbot talk contribs m 13,501 bytes −41 →Complex modeling of the lens system and photoresist: Task 16: replaced (1×) / removed (0×) deprecated |dead-url= and |deadurl= with |url-status=; undo Tag: AWB

curprev 06:1006:10, 3 April 2019 Daviddwd talk contribs 13,542 bytes +89 short desc undo Tag: Visual edit

curprev 19:4619:46, 15 February 2019 GreenC bot talk contribs 13,453 bytes +64 Reformat 1 archive link. Wayback Medic 2.5 undo

curprev 03:4303:43, 1 December 2018 Kkmurray talk contribs 13,389 bytes −278 Clean up undo

curprev 15:5115:51, 5 November 2018 InternetArchiveBot talk contribs 13,667 bytes +290 Rescuing 1 sources and tagging 0 as dead. #IABot (v2.0beta9) undo

curprev 16:3516:35, 10 November 2016 Pleasantville talk contribs 13,377 bytes +43 added Category:Computational fields of study using HotCat undo

curprev 20:1720:17, 13 September 2016 Matmatpenguin talk contribs m 13,334 bytes +33 →A CPU-century worth of calculations or more: marked dead link, no matching Wayback Machine entry could be found undo

curprev 18:4718:47, 19 June 2016 WereSpielChequers talk contribs m 13,301 bytes −3 →Complex modeling of the lens system and photoresist: Typo fixing, replaced: on of → one of using AWB undo

curprev 07:2707:27, 8 February 2016 Transmit-receive talk contribs m 13,304 bytes +4 Corrected duplicate ref name undo

curprev 04:5204:52, 12 January 2016 TAnthony talk contribs 13,300 bytes −1 Update deprecated cite parameter (coauthors) and genfixes using AWB undo

curprev 22:4222:42, 21 December 2014 Trappist the monk talk contribs m 13,301 bytes −26 Remove redundant |year= parameter from CS1 citations; using AWB undo

curprev 21:4721:47, 13 February 2014 Serketan talk contribs 13,327 bytes 0 →A CPU-century worth of calculations or more undo Tag: Visual edit

curprev 22:1222:12, 9 August 2013 70.35.36.66 talk 13,327 bytes +21 →A short history of computational lithography undo

curprev 18:4318:43, 20 February 2013 Squigish talk contribs m 13,306 bytes −1 →A short history of computational lithography: removed comma undo

curprev 05:5105:51, 5 November 2012 74.194.154.31 talk 13,307 bytes +22 →A CPU-century worth of calculations or more undo

curprev 01:3401:34, 18 January 2012 158.140.1.28 talk 13,285 bytes +51 →A short history of computational lithography undo

curprev 22:3622:36, 27 December 2011 Rjwilmsi talk contribs m 13,234 bytes −3 cite parameter clean up using AWB (7892) undo

curprev 03:5003:50, 9 October 2011 Cmprince talk contribs 13,237 bytes −301 Reverted 1 edit by 88.167.71.127 (talk): Biased tone, no reference for overnight, 1000 node claim. (TW) undo

curprev 06:2906:29, 8 September 2011 88.167.71.127 talk 13,538 bytes +301 No edit summary undo

curprev 17:3117:31, 4 August 2011 Cmprince talk contribs 13,237 bytes +27 →A short history of computational lithography: +link to Chris Mack (scientist) undo

curprev 02:1202:12, 23 May 2011 Σ talk contribs m 13,210 bytes −5 Replaced {{cleanup-jargon}} with {{technical}} undo

curprev 21:2521:25, 3 May 2011 Voxadam talk contribs m 13,215 bytes −2 →A CPU-century worth of calculations or more undo
curprev 21:2521:25, 3 May 2011 Voxadam talk contribs m 13,217 bytes −1 →Complex modeling of the lens system and photoresist undo
curprev 21:2521:25, 3 May 2011 Voxadam talk contribs m 13,218 bytes −4 →A short history of computational lithography undo

curprev 22:4822:48, 10 March 2011 Citation bot 1 talk contribs m 13,222 bytes +10 No edit summary undo

curprev 18:2818:28, 2 January 2011 Eugene-elgato talk contribs m 13,212 bytes +2 →A short history of computational lithography undo

curprev 01:3301:33, 15 November 2010 A5b talk contribs m 13,210 bytes +13 ASML Holding undo

curprev 11:1911:19, 20 June 2010 Lightmouse talk contribs 13,197 bytes +9 Mostly units undo

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