Process window
It is proposed that this article be deleted because of the following concern:
If you can address this concern by improving, copyediting, sourcing, renaming, or merging the page, please edit this page and do so. You may remove this message if you improve the article or otherwise object to deletion for any reason. Although not required, you are encouraged to explain why you object to the deletion, either in your edit summary or on the talk page. If this template is removed, do not replace it. This message has remained in place for seven days, so the article may be deleted without further notice. Find sources: "Process window" – news · newspapers · books · scholar · JSTOR Nominator: Please consider notifying the author/project: {{subst:proposed deletion notify|Process window|concern=Pure [[WP:OR]] and an essay. Either to be salvaged with relevant context and citations or to be deleted.}} ~~~~Timestamp: 20131001141758 14:17, 1 October 2013 (UTC) Administrators: delete |
The process window is a graph with a range of parameters where a specific process yields a defined result. Typically multiple parameters are plotted in such a graph with a central region where the process behaves well, while the outer borders define regions where the process becomes unstable or returns an unfavourable result. Typical applications are found in photolithography where the response of a photoresist to parameters like temperature, radiation intensity, critical dimension and sidewall angle of the structures, etc. are plotted versus an optical parameter such as the numerical aperture to optimize the design of an exposure tool or to achieve a reproducible result and high yield.