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Feature-oriented positioning

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Feature-oriented positioning (FOP)[1][2] is a method of precise movement of the scanning microscope probe across the surface under investigation. With this method, surface features (objects) are used as reference points for microscope probe attachment. Actually, FOP is a simplified variant of the feature-oriented scanning (FOS). With FOP, no topographical image of a surface is acquired. Instead, a probe movement over surface features is only carried out from the start surface point A (neighborhood of the start feature) to the destination point B (neighborhood of the destination feature) along some route that goes through intermediate features of the surface. The method may also be referred to by another name — object-oriented positioning (OOP).

To be distinguished are a "blind" FOP when the coordinates of features used for probe movement are unknown in advance and FOP by existing feature "map" when the relative coordinates of all features are known, for example, when they were obtained during preliminary FOS. Probe movement by a navigation structure is a combination of the above by-point methods.

The FOP method may be used in bottom-up nanofabrication to implement high-precision movement of the nanolithograph/nanoassembler probe along the substrate surface. Moreover, after having traversed some route once, FOP may then be exactly repeated the required number of times. After movement to the specified position, an influence on the surface or manipulation of a surface object (nanoparticle, molecule, atom) is performed. All the operations are carried out in automatic mode. With multiprobe instruments, the FOP approach enables the application of any number of specialized technological and/or analytical probes successively to a surface feature/object or to a specified point in the feature/object neighborhood. That opens up the prospect of building a complex nanofabrication consisting of a large number of technological, measuring, and checking operations.

See also

References

  1. ^ R. V. Lapshin (2004). "Feature-oriented scanning methodology for probe microscopy and nanotechnology" (PDF). Nanotechnology. 15 (9). UK: IOP: 1135–1151. doi:10.1088/0957-4484/15/9/006. ISSN 0957-4484.
  2. ^ R. V. Lapshin (2011). "Feature-oriented scanning probe microscopy". In H. S. Nalwa (ed.). Encyclopedia of Nanoscience and Nanotechnology (PDF). Vol. 14. USA: American Scientific Publishers. pp. 105–115. ISBN 1-58883-163-9.


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