ATtiny microcontroller comparison chart

device (family)	first issue (datasheet)	architecture	i/o pins	packages	flash b	ram b	eeprom b	twi	usi	spi	uart	8 bit counters	16 bit counters	pwm	adc	max clock mhz
attiny28l	2005/03	avr1	11	pdip-28 tfqp/qfn/mlf-32	2048	32	-	-	-	-	-	1	-	1 x 1	-	4
attiny26	2003/02	avr2	16	pdip-20 soic-20 qfn/mlf-32	2048	128	128	-	-	-	-	2	-	1 x 2	11 ch / 10 b	16
attiny13/13a	2003/06 2008/05(a)	avr25	6	pdip-8 soic-8 mlf-10 mlf-20	1024	64	64	-	-	-	-	1	-	1 x 2	4 ch / 10 b	20
attiny25 / attiny45 / attiny85	2005/02	avr25	6	pdip-8 soic-8 qfn/mlf-20 tssop-8	2048 / 4096 / 8192	128 / 256 / 512	128 / 256 / 512	-	1	-	-	2	-	1 x 2	4 ch / 10 b	20
attiny24/24a / attiny44/44a / attiny84/84a	2005/12 2008/12(a)	avr25	12	pdip-14 soic-14 qfn/mlf/vqfn-20 ufbga-15	2048 / 4096 / 8192	128 / 256 / 512	128 / 256 / 512	-	1	-	-	1	1	2 x 2	8ch / 10 b	20
attiny261/261a / attiny461/461a / attiny861/861a	2006/10 2009/10(a)	avr25	16	pdip-20 soic-20 tssop-20 mlf-32	2048 / 4096 / 8192	128 / 256 / 512	128 / 256 / 512	-	1	-	-	1	1	1 x 3	11ch / 10 b	20
attiny43u	2009/02	avr25	16	soic-20 mlf/vqfn-20	4096	256	64	-	1	-	-	2	-	2 x 2	4 ch / 10 b	8
attiny87 / attiny167	2010/08	avr25	16	soic-20 vqfn-32 tssop-20	8192 / 16384	512	512	-	1	1	1	1	1	1 x 1	11 ch / 10 b	16
attiny2313 / attiny2313a/4313	2003/09 / 2009/11(a)	avr25	18	pdip-20 soic-20 mlf/vqfn-20	2048 / 4096	128 / 256	128 / 256	-	1	-	1	1	1	1 x 4	-	20
attiny48 / attiny88	2008/06	avr25	24 / 28	pdip-28 qfn-28 tqfp-32 qfn-32 ufbga-32	4096 / 8192	256 / 512	64	1	-	1	-	1	1	1 x 2	6/8 ch 10 b	12
attiny4 / attiny5 / attiny9 / attiny10	2009/04	avrtiny20	4	sot-23 udfn	512 / 1024	32	-	-	-	-	-	-	1	1 x 2	4 ch / 8 b (attiny5/10 only)	12
attiny20	2010/03	avrtiny20	12	soic-14 ufbga-15 vqfn-20	2048	128	-	slave	-	1	-	1	1	2 x 2	8 ch / 10 b	12
attiny40	2010/08	avrtiny20	18	soic/tssop-20 vqfn/mlf-20	4096	256	-	slave	-	1	-	1	1	1 x 2	12 ch / 10 b	12
attiny1634	2011/11		18	mlf(wfqn)-20 soic(300mil)-20	16384	1024	256	slave	1	-	2	1	1	2 x 2	12 ch / 10 b	12