User:Ismith/Automated Material Handling System
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An Automated Material Handling System is a system that controls the storage and transportation of silicon wafers in FOUPs in a wafer fabrication plant. It's job is to ensure that the right FOUP is delivered to the right tool at the right time.
It is made up of several components:
- Rail system
- Stockers
- Output stations
- Vehicles
- Control software
Material handling systems have two modes of operation:
- Interbay
- Intrabay
They may also have separate systems with stations to transfer FOUPs between the two.