Deep-level transient spectroscopy

Deep Level Transient Spectroscopy (DLTS) is unique and powerful tool for the study of electrically active defects in semiconductors. In DLTS a defect is observed by monitoring the effect of a emission of a carrier from a deep level to the valence (p-type) or to the conduction (n-type) band.The transition from a deep level to the band (valence or conduction) is observed as a change in the capacitance.