| Display title | Computational lithography |
| Default sort key | Computational lithography |
| Page length (in bytes) | 13,476 |
| Namespace ID | 0 |
| Page ID | 20606961 |
| Page content language | en - English |
| Page content model | wikitext |
| Indexing by robots | Allowed |
| Number of page watchers | Fewer than 30 watchers |
| Number of redirects to this page | 1 |
| Counted as a content page | Yes |
| Wikidata item ID | Q5157329 |
| Local description | Algorithmic approaches to improving resolution in photolithography |
| Central description | algorithmic approaches to improving resolution in photolithography |
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| Page creator | Devanney (talk | contribs) |
| Date of page creation | 05:24, 9 December 2008 |
| Latest editor | GreenC bot (talk | contribs) |
| Date of latest edit | 20:40, 3 May 2025 |
| Total number of edits | 67 |
| Recent number of edits (within past 30 days) | 1 |
| Recent number of distinct authors | 1 |
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