Deep reactive-ion etching: Revision history

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curprev 15:2415:24, 28 February 2025 Citation bot talk contribs 13,212 bytes +84 Add: doi-access, url. | Use this bot. Report bugs. | Suggested by Headbomb | Linked from Wikipedia:WikiProject_Academic_Journals/Journals_cited_by_Wikipedia/Sandbox | #UCB_webform_linked 18/69 undo

curprev 16:5816:58, 30 December 2024 KMaster888 talk contribs 13,128 bytes −2 ce undo
curprev 16:5816:58, 30 December 2024 KMaster888 talk contribs 13,130 bytes +4 add link undo

curprev 20:4920:49, 10 May 2024 Beland talk contribs m 13,126 bytes 0 mu not micro per MOS:NUM#Specific units and Unicode compatibility characters (via WP:JWB) undo

curprev 02:5802:58, 29 April 2024 Synapse554 talk contribs m 13,126 bytes −22 No edit summary undo
curprev 02:5602:56, 29 April 2024 Synapse554 talk contribs 13,148 bytes +30 Proofreading undo

curprev 00:1900:19, 16 February 2024 ComputerUserUser talk contribs 13,118 bytes +23 No edit summary undo Tag: 2017 wikitext editor

curprev 12:0012:00, 2 January 2024 Materialscientist talk contribs m 13,095 bytes +2,013 Reverted edits by 49.205.37.30 (talk) (HG) (3.4.12) undo Tags: Huggle Rollback
curprev 11:5811:58, 2 January 2024 49.205.37.30 talk 11,082 bytes −2,013 No edit summary undo Tag: Reverted

curprev 01:1601:16, 12 December 2023 Me, Myself, and I are Here talk contribs 13,095 bytes −1 alpha, layout undo Tags: Mobile edit Mobile web edit Advanced mobile edit

curprev 14:3114:31, 21 June 2023 Citation bot talk contribs 13,096 bytes +29 Add: bibcode. | Use this bot. Report bugs. | Suggested by Headbomb | Linked from Wikipedia:WikiProject_Academic_Journals/Journals_cited_by_Wikipedia/Sandbox | #UCB_webform_linked 195/640 undo

curprev 22:4222:42, 19 June 2023 Citation bot talk contribs 13,067 bytes −248 Alter: url. URLs might have been anonymized. | Use this bot. Report bugs. | #UCB_CommandLine undo

curprev 22:1522:15, 21 January 2023 Citation bot talk contribs 13,315 bytes +428 Add: s2cid, url. | Use this bot. Report bugs. | Suggested by Corvus florensis | #UCB_webform 1451/1800 undo

curprev 09:4609:46, 16 January 2023 Dicklyon talk contribs m 12,887 bytes +4 dash fix (via WP:JWB) undo

curprev 16:2416:24, 27 November 2022 Ataar Satag talk contribs 12,883 bytes +298 No edit summary undo

curprev 23:2823:28, 12 October 2022 Golden Freddy3124 talk contribs m 12,585 bytes +54 Adding short description: "Highly anisotropic etch process" undo Tag: Shortdesc helper

curprev 20:2920:29, 3 October 2021 Citation bot talk contribs 12,531 bytes +19 Add: doi-access. | Use this bot. Report bugs. | Suggested by Headbomb | Linked from Wikipedia:WikiProject_Academic_Journals/Journals_cited_by_Wikipedia/Sandbox | #UCB_webform_linked 55/797 undo

curprev 02:4902:49, 20 May 2021 174.3.244.135 talk 12,512 bytes −1 No edit summary undo

curprev 01:5001:50, 7 May 2021 OAbot talk contribs m 12,513 bytes +55 Open access bot: hdl added to citation with #oabot. undo

curprev 13:4613:46, 23 February 2021 2409:4073:4e87:fd94::c8b:2a05 talk 12,458 bytes +527 Description of DRIE undo Tags: Visual edit Mobile edit Mobile web edit

curprev 07:5207:52, 18 October 2020 Citation bot talk contribs 11,931 bytes −44 Alter: url. URLs might have been internationalized/anonymized. Add: pmid, s2cid, author pars. 1-1. Removed parameters. Some additions/deletions were actually parameter name changes. | You can use this bot yourself. Report bugs here. | Suggested by Abductive | Category:Semiconductor device fabrication | via #UCB_Category 150/170 undo

curprev 01:4301:43, 10 September 2020 Jimw338 talk contribs 11,975 bytes +556 →Applications: citation to Chekurov et al 2009 (Fabrication of silicon nanostructures by local gallium..) - not sure if there's a "researchgate" parameter for cite template yet.. undo

curprev 10:0110:01, 12 April 2020 OAbot talk contribs m 11,419 bytes +18 Open access bot: hdl added to citation with #oabot. undo

curprev 21:2621:26, 18 February 2020 AManWithNoPlan talk contribs 11,401 bytes +132 Add: doi, pages, issue, volume, bibcode. Removed URL that duplicated unique identifier. Formatted dashes. | You can use this tool yourself. Report bugs here. | via #UCB_Gadget undo

curprev 18:3518:35, 18 January 2020 Forbes72 talk contribs m 11,269 bytes +135 improve an existing ref undo

curprev 06:2406:24, 26 September 2019 Marnie Hawes talk contribs 11,134 bytes +86 Added free to read link in citations with OAbot #oabot undo Tag: OAbot [1.0]

curprev 07:3107:31, 24 September 2019 PedjaNbg talk contribs 11,048 bytes +77 Added free to read link in citations with OAbot #oabot undo Tag: OAbot [1.0]

curprev 16:1016:10, 20 September 2019 PedjaNbg talk contribs 10,971 bytes +82 Added free to read link in citations with OAbot #oabot undo Tag: OAbot [1.0]

curprev 19:4219:42, 27 August 2019 Bender the Bot talk contribs m 10,889 bytes +1 →Applications: HTTP → HTTPS for IEEE Xplore, replaced: http://ieeexplore.ieee.org/abstract/ → https://ieeexplore.ieee.org/abstract/ undo Tag: AWB

curprev 07:2307:23, 24 July 2019 Citation bot talk contribs m 10,888 bytes +28 Add: doi, pages, issue, volume. Removed URL that duplicated unique identifier. Formatted dashes. | You can use this bot yourself. Report bugs here.| Activated by User:Headbomb undo
curprev 06:2906:29, 24 July 2019 OAbot talk contribs m 10,860 bytes +20 Open access bot: add arxiv identifier to citation with #oabot. undo

curprev 09:2909:29, 11 July 2019 Citation bot talk contribs m 10,840 bytes −20 Add: hdl. Removed URL that duplicated unique identifier. | You can use this bot yourself. Report bugs here.| Activated by User:Marianne Zimmerman undo

curprev 14:4914:49, 10 April 2019 Jamie Lokier talk contribs m 10,860 bytes +4 →Bosch process: Make "Octafluorocyclobutane" be link to the article for that substance, like Sulfur hexaflouride in the line above undo

curprev 03:0003:00, 6 February 2019 Citation bot talk contribs m 10,856 bytes −161 Alter: journal. Add: hdl, pages, volume, issue, pmid. Removed parameters. Formatted dashes. | You can use this bot yourself. Report bugs here. | User-activated. undo

curprev 19:0319:03, 23 April 2018 128.3.108.195 talk 11,017 bytes +2 →Applications undo

curprev 18:2618:26, 7 April 2018 Rjwilmsi talk contribs m 11,015 bytes +31 →Applications: Journal cites, Added 1 doi to a journal cite undo Tag: AWB

curprev 10:3410:34, 17 March 2018 Rjwilmsi talk contribs m 10,984 bytes +219 Journal cites:, added 4 DOIs undo Tag: AWB

curprev 06:1406:14, 17 September 2017 136.25.144.227 talk 10,765 bytes −2 No edit summary undo

curprev 11:3411:34, 26 February 2017 Bender the Bot talk contribs m 10,767 bytes +1 →Precision Machinery: HTTP→HTTPS for The New York Times. using AWB undo

curprev 14:3014:30, 18 January 2017 212.139.225.75 talk 7,167 bytes 0 →Bosch process undo

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